Installation of PVD/PE-CVD coater in Flamac

As part of our strategic research agenda Flamac has acquired an automated thin film deposition system. The platform consists of 8 process chambers enabling the study of PVD (Physical Vapour Deposition) and PE-CVD (Plasma Enhanced Chemical Vapour Deposition) coating processes. All chambers are mounted on a central transfer chamber. Additionally, each chamber is equipped with an IR heating unit. The module can handle a variety of substrates such as glass, metals or plastics.

Don’t hesitate to contact us if you are interested to use this equipment for your research.

Flamac